SENTINEL Block Controllers

The SENTINEL equipment block controllers provide many features to raise yield, reduce costs, and improve equipment uptime utilizing the extensive suite of data logging and analysis tools.

Features

• Data logging exceeding OEM on tool capabilities
• Built-in statistical analysis capabilities and fault detection control
• Data export functions to allow correlations to yield and electrical test data
• Accessible from any computer on your network
• Ability to compare / overlay results from multiple tools / runs
• Optimized to provide a responsive environment
• Ability to remotely edit and verify recipes

Supported tool sets include:

• Axcelis GSD series ion implantation systems.
• Contact us today to determine if we can support your toolset too!