SENTINEL Block Controller for Axcelis GSD Ion Implanters

The SENTINEL block controller for the Axcelis GSD Ion Implanters supports additional capabilities with advanced data collection that exceeds the OEM built-in logging capability.

Features and Specifications

High frequency beam monitoring (~5 samples / second)
Remote recipe editing and verification of 'golden recipe'
Optimized database allows for responsive data analysis
Data export capability to allow further analysis using preferred statistics package
Fault detection control (FDC) and statistical process control (SPC)
FDC and SPC email notifications
Programmable usage based PM counters