The SENTINEL block controller for the Axcelis GSD Ion Implanters supports additional capabilities with advanced data collection that exceeds the OEM built-in logging capability.
Features and Specifications
- High frequency beam monitoring (~5 samples / second)
- Remote recipe editing and verification of 'golden recipe'
- Optimized database allows for responsive data analysis
- Data export capability to allow further analysis using preferred statistics package
- Fault detection control (FDC) and statistical process control (SPC)
- FDC and SPC email notifications
- Programmable usage based PM counters
Contact us today for more details or to arrange for a demonstration.