Carsley Solutions

Products: Sentinel

SENTINEL equipment block controllers raise yield, reduce costs, and improve equipment uptime utilizing a suite of data logging and analysis tools.

Sentinel Key Benefits & Features:

Data logging exceeding OEM on tool capabilities
Built-in statistical analysis capabilities and fault detection control
Data export functions allowing correlations to yield and electrical test data
Accessible from any computer on your network
Ability to compare / overlay results from multiple tools / runs
Optimized to provide a responsive environment
Ability to remotely edit and verify recipes

Supported Tool Sets Include:

Axcelis GSD series ion implantation systems.
Contact us today to determine if we can support your toolset.

To learn more about Sentinel, contact the Carsley team to schedule a demo.

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